JPS6224131Y2 - - Google Patents

Info

Publication number
JPS6224131Y2
JPS6224131Y2 JP8428181U JP8428181U JPS6224131Y2 JP S6224131 Y2 JPS6224131 Y2 JP S6224131Y2 JP 8428181 U JP8428181 U JP 8428181U JP 8428181 U JP8428181 U JP 8428181U JP S6224131 Y2 JPS6224131 Y2 JP S6224131Y2
Authority
JP
Japan
Prior art keywords
lid
container
moving block
support device
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8428181U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57196854U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8428181U priority Critical patent/JPS6224131Y2/ja
Publication of JPS57196854U publication Critical patent/JPS57196854U/ja
Application granted granted Critical
Publication of JPS6224131Y2 publication Critical patent/JPS6224131Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Pressure Vessels And Lids Thereof (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP8428181U 1981-06-10 1981-06-10 Expired JPS6224131Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8428181U JPS6224131Y2 (en]) 1981-06-10 1981-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8428181U JPS6224131Y2 (en]) 1981-06-10 1981-06-10

Publications (2)

Publication Number Publication Date
JPS57196854U JPS57196854U (en]) 1982-12-14
JPS6224131Y2 true JPS6224131Y2 (en]) 1987-06-19

Family

ID=29879650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8428181U Expired JPS6224131Y2 (en]) 1981-06-10 1981-06-10

Country Status (1)

Country Link
JP (1) JPS6224131Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023166653A1 (ja) * 2022-03-03 2023-09-07 キヤノンアネルバ株式会社 真空処理装置

Also Published As

Publication number Publication date
JPS57196854U (en]) 1982-12-14

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